EZ-TILT-3A-DFN-IC
SILICON
MICROMACHINED
THREE AXIS INCLINOMETER
High
performance micro-machined solid state three axis inclinometer delivers
excellent reliability over wide temperature range and upon request can
accept power sources
of 2.7 to 5.5 Vdc. Based on the principle of differential capacitance,
the unit
detects and converts tilt changes into proportional analog voltage.
Sensor is
packaged into a ultra-small DFN SMT package. Easy installation and
rugged design
make it suitable for numerous high precision
applications
with tilt range of +-90 arcdeg.
|
Parameter |
units |
value |
|
|
|
|
|
RANGE,
Xout, Yout, Zout |
g ( arcdeg) |
+-1 (+-90
arcdeg) |
|
SENSITIVITY,
Xout, Yout, Zout |
mV/g |
2000 |
|
NULL
OFFSET vs. TEMPERATURE |
mV |
+-175 @
full temp.range |
|
OPERATING
TEMPERATURE |
degC |
-40---- +85 |
|
STORAGE
TEMPERATURE |
degC |
-55----
+125 |
|
SENSITIVITY
vs. TEMP |
% |
+-3 maximum |
|
ANGULAR
REPEATABILITY |
arcdeg |
<0.05 |
|
OUTPUT
SPAN FULL SCALE |
mV |
+-2000 |
|
BANDWIDTH |
Hz |
0-3000
maximum |
|
OUTPUT
RESISTANCE |
Ohms |
35000 typ |
|
NON-LINEARITY |
% of FS |
<0.5 |
|
CROSS AXIS
SENSITIVITY |
% |
<3.0 |
|
CURRENT
CONSUMPTION |
mA |
2 (
typical ) |
|
SUPPLY
VOLTAGE, Vdd |
Vdc |
5 ( other
voltages available upon request ) |
|
MAX SHOCK |
g |
4500 for
0.5msec |
|
ESD |
V |
2950 |
|
PACKAGING |
SMT |
DFN 5x5mm |
The DFN IC package conforms to European Union
Directive
2002/95/EC ( RoHS complient.)
Specifications may change
without notice.